Perovskite vapor deposition process being developed

“In Liverpool, we use a hybrid deposition method that combines the best aspects of both approaches. It is a vacuum evaporation process to deposit the inorganic components and then a second wet chemical step to convert this inorganic scaffold to the complete perovskite film. We target a throughput of several M12 wafers per h, or 40 per day,” said Borchert.

investigating the use of commercially available vacuum-based evaporation equipment to manufacture perovskite thin films and contacts layers in the fabrication of perovskite-silicon tandem cells

highest efficiency tandem cells, measuring 1 cm² or even smaller, are typically made with a wet chemicalspin coating tool. “It is a good method for rapid testing but not scalable to industrial substrate sizes”

“There is a large variety of deposition methods for perovskite thin films. Some rely exclusively on wet-chemical processes, such as spin coating, blade coating and printing. Others are solvent-free evaporation processes in a vacuum, such as physical vapor deposition, or pulsed laser deposition,”

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